Silicon Wafer with microchips - A wafer is a thin slice of semiconductor material, such as a crystalline silicon, used in electronics for the fabrication of integrated circuits.
Helios main 500px
Heliso side 300
Helios main 500px
Heliso side 300
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Helios Series

The newest, most advanced RF matching network in the market

With power levels from 100 W to 50 kW and Frequencies from 2 MHz to 100 MHz

  • Robust RF performance using the latest digital controls
  • Flexible user interface meeting most needs
  • Advanced features are standard!  

Highlights

The Helios series of matching networks operate at a fixed frequency over the range of 2 MHz to 100 MHz and 100 W to 50 kW . Our matching networks are designed to operate into the extreme dynamic loads found in semiconductor and industrial coatings applications.

With a broad power and frequency range, the Helios series is designed for most RF plasma applications.

Benefits

  • Fast tune time for precise process repeatability
  • Full control of tuning parameters for easy installation
  • Interfaces with Aurora RF Generators or stand alone operation

Features

  • Full digital control
  • Wide tuning range
  • Analog or Serial interfaces
  • Presets
  • Pulsing
  • Full digital control